BOTH SIDE MULTILAYER THIN FLIM LAMINATING DEVICE OF BOARDS USING REACTIVE SPUTTERING PROCESS

A double sided multi-layered thin film accumulating apparatus of a substrate using the reactive sputtering processing is provided to improve productivity because the production process of product is shortened. A double sided multi-layered thin film accumulating apparatus of a substrate using the reactive sputtering processing comprises a fixing unit, a sputter deposition part, a cooling part(400), a chamber(100). The fixing unit fixes substrate inside the chamber. The sputter deposition part evaporates both sides of the substrate fixed to the fixing unit at the same time. The cooing part cools the heat which is generated from the deposition process of the sputter deposition part.