METHOD AND APPARATUS FOR PATTERN INSPECTION

A method and an apparatus for checking a pattern are provided to enhance use efficiency of a light by using all light delivered to a spherical body. A pattern of a copper foil is formed on a top surface of a transparent base film. A transparent reinforcing member supports a bottom surface of the tra...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	HATTORI SHINICHI, MATSUNO SHUZO
Format:	Patent
Sprache:	eng
Schlagworte:	CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS PRINTED CIRCUITS TESTING
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Beschreibung
Zusammenfassung:	A method and an apparatus for checking a pattern are provided to enhance use efficiency of a light by using all light delivered to a spherical body. A pattern of a copper foil is formed on a top surface of a transparent base film. A transparent reinforcing member supports a bottom surface of the transparent base film. A check part(16) includes a transfer roller(161,162) and a picturing part(163). The transfer roller horizontally transfers a tape(10). The picturing part takes a picture of a transmitting image of the tape between rollers. The picturing part includes a lighting unit(164), a camera(165), and a light source(166). A buffer part(18) absorbs a change of a transfer speed of the tape by a dancer roller(183).