PHOTONIC QUANTUM RING LASER AND ITS FABRICATION METHOD

A photonic quantum ring laser and a manufacturing method thereof are provided to oscillate a vertical resonant type multi-mode laser by forming reflective layers in upper and lower parts of a gallium nitride-based multi-quantum well structure. A photonic quantum ring laser includes a metallic reflec...

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Hauptverfasser: KWON, O DAE, LEE, SEUNG EUN, SHIN, MI HYANG, KIM, YOUNG CHUN, JANG, YOUNG HEUB, YOON, JUN HO
Format: Patent
Sprache:eng ; kor
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Zusammenfassung:A photonic quantum ring laser and a manufacturing method thereof are provided to oscillate a vertical resonant type multi-mode laser by forming reflective layers in upper and lower parts of a gallium nitride-based multi-quantum well structure. A photonic quantum ring laser includes a metallic reflective layer(202), an active layer(206), a coating layer(212), an upper electrode(214), and a distributed bragg reflector. The metallic reflective layer is positioned on a supporting substrate(200). The active layer is formed as a multi-quantum well structure between an epitaxially grown p-GaN layer(204) and n-GaN layer(208). The coating layer is formed on a selectively etched outside of the active layer. The upper electrode is electrically connected to an upper part of the n-GaN layer. The distributed bragg reflector is formed on the n-GaN layer and the upper electrode.