EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR DEVICE

A semiconductor manufacturing system is provided to increase or maximize a production yield by preventing defects in a semiconductor manufacturing process due to an overheating effect of an outer top electrode. A semiconductor manufacturing system includes a reaction chamber(120), an electrostatic c...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HYUN, KI CHUL, KIM, SANG HO, SHIM, JAE EUN, HAN, OH YUN, KIM, HAG PIL, KIM, GI HONG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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