SILICON PRODUCTION WITH A FLUIDIZED BED REACTOR INTEGRATED INTO A SIEMENS-TYPE PROCESS

A fluidized bed reactor and a Siemens reactor are used to produce polycrystalline silicon. The process includes feeding the vent gas from the Siemens reactor as a feed gas to the fluidized bed reactor.

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Bibliographische Detailangaben
Hauptverfasser: MOLNAR MICHAEL, ARVIDSON ARVID NEIL
Format: Patent
Sprache:eng
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Zusammenfassung:A fluidized bed reactor and a Siemens reactor are used to produce polycrystalline silicon. The process includes feeding the vent gas from the Siemens reactor as a feed gas to the fluidized bed reactor.