INDUCTION HEATING MODULE IN THE CHEMICAL VAPOR DEPOSITION EQUIPMENT FOR HIGH THROUGHPUT

An induction heater for a chemical vapor deposition device is provided to improve quality of a thin film by separating an induction coil into two or plural parts inside the chamber and connecting the separated part to the outside of the chamber. A driving unit(300) includes a driving motor axially c...

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Bibliographische Detailangaben
Hauptverfasser:	SEONG, HWAN HO, LEE, GYEONG HA, KIM, SANG CHUL
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	An induction heater for a chemical vapor deposition device is provided to improve quality of a thin film by separating an induction coil into two or plural parts inside the chamber and connecting the separated part to the outside of the chamber. A driving unit(300) includes a driving motor axially coupled with a rotation driving gear and a revolution driving gear. A ring shaped housing is fixed in an upper part of a base plate(500). A wheel gear(340) for rotation and the wheel gear(350) for revolution are gear-engaged with the driving gear. The bottom of a driven gear for rotation is rotatably supported in an inner side of the wheel gear for revolution and the top of the driven gear is fixed in the center of a susceptor for rotation. A support pipe is covered in the outside of a rotation axis for rotation. The top of the support pipe supports the susceptor for revolution and the bottom of the support pipe is fixed in the wheel gear for revolution.