APPARATUS FOR TRANSFERRING SUBSTRATE

A substrate transfer apparatus is provided to precisely control rollers at the same time by mounting the rollers on a single shaft and regulating the level of the shaft using control bars. A substrate transfer apparatus comprises a plurality of shafts(210a,210b) installed at an interval and rotated...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: KIM, KEE WOONG
Format: Patent
Sprache:eng
Schlagworte:
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