APPARATUS FOR TRANSFERRING SUBSTRATE
A substrate transfer apparatus is provided to precisely control rollers at the same time by mounting the rollers on a single shaft and regulating the level of the shaft using control bars. A substrate transfer apparatus comprises a plurality of shafts(210a,210b) installed at an interval and rotated...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A substrate transfer apparatus is provided to precisely control rollers at the same time by mounting the rollers on a single shaft and regulating the level of the shaft using control bars. A substrate transfer apparatus comprises a plurality of shafts(210a,210b) installed at an interval and rotated with by a driving member, a plurality of rollers(220a,220b) installed at an interval on each shaft and transferring substrates in contact with the substrates, a plurality of guide shafts(260) installed under the shafts to correspond to the respective shafts, and control bars(270) fixed to the guide shafts in the perpendicular direction to the shafts in order to control the position of the shafts. |
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