METHOD OF MANUFACTURING AN APPARATUS FOR HEATING SUBSTRATE

METHOD OF MANUFACTURING AN APPARATUS FOR HEATING SUBSTRATE

A method for manufacturing a substrate heating device is provided to improve bonding between a heating element pattern, an electrode pattern, and a ceramic sintered body by using a ceramic paste. A first ceramic paste(120) is coated on a first ceramic sintered body(110). A heating element pattern(13...

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Hauptverfasser: HAN, JIN HEE, BAE, JUN GU, JUNG, BYUNG JIN
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CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
PRINTED CIRCUITS
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creator HAN, JIN HEE
BAE, JUN GU
JUNG, BYUNG JIN
description A method for manufacturing a substrate heating device is provided to improve bonding between a heating element pattern, an electrode pattern, and a ceramic sintered body by using a ceramic paste. A first ceramic paste(120) is coated on a first ceramic sintered body(110). A heating element pattern(130) is formed on the first ceramic paste. A second ceramic paste(140) is coated on the heating element pattern and the first ceramic paste. A second ceramic sintered body(150) is arranged on the second ceramic paste. A third ceramic paste(160) is coated on the second ceramic sintered body. An electrode pattern(170) is formed on the third ceramic paste. A fourth ceramic paste(180) is coated on the third ceramic paste and the electrode pattern. The third ceramic sintered body(190) is arranged on the fourth ceramic paste. The first to third ceramic sintered bodies, the first to fourth ceramic pastes, the heating element pattern, and the electrode pattern are sintered.
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subjects CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
PRINTED CIRCUITS
title METHOD OF MANUFACTURING AN APPARATUS FOR HEATING SUBSTRATE
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