METHOD OF MANUFACTURING AN APPARATUS FOR HEATING SUBSTRATE

A method for manufacturing a substrate heating device is provided to improve bonding between a heating element pattern, an electrode pattern, and a ceramic sintered body by using a ceramic paste. A first ceramic paste(120) is coated on a first ceramic sintered body(110). A heating element pattern(13...

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Bibliographische Detailangaben
Hauptverfasser:	HAN, JIN HEE, BAE, JUN GU, JUNG, BYUNG JIN
Format:	Patent
Sprache:	eng
Schlagworte:	CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS PRINTED CIRCUITS
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Beschreibung
Zusammenfassung:	A method for manufacturing a substrate heating device is provided to improve bonding between a heating element pattern, an electrode pattern, and a ceramic sintered body by using a ceramic paste. A first ceramic paste(120) is coated on a first ceramic sintered body(110). A heating element pattern(130) is formed on the first ceramic paste. A second ceramic paste(140) is coated on the heating element pattern and the first ceramic paste. A second ceramic sintered body(150) is arranged on the second ceramic paste. A third ceramic paste(160) is coated on the second ceramic sintered body. An electrode pattern(170) is formed on the third ceramic paste. A fourth ceramic paste(180) is coated on the third ceramic paste and the electrode pattern. The third ceramic sintered body(190) is arranged on the fourth ceramic paste. The first to third ceramic sintered bodies, the first to fourth ceramic pastes, the heating element pattern, and the electrode pattern are sintered.