ELECTROSTATIC CHUCK APPARATUS
An electrostatic chuck apparatus is provided to lower the thermal load of substrate by increasing the heat transmission of the heat transmission gas in the electrostatic chuck. An electrostatic chuck apparatus comprises a dielectric member supporting a substrate. The dielectric member has a receivin...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | An electrostatic chuck apparatus is provided to lower the thermal load of substrate by increasing the heat transmission of the heat transmission gas in the electrostatic chuck. An electrostatic chuck apparatus comprises a dielectric member supporting a substrate. The dielectric member has a receiving surface(620) of the circular shape. The receiving surface has a plurality of mesa(600). The mesa is arranged along the concentric circle having the center of the receiving surface. The mesas are arranged along the circular perimeter of the concentric circles with the fixed interval. |
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