END SECTION INSPECTING APPARATUS

An end section inspecting apparatus is provided with an illuminating means (5) for applying diffused light to an end section of a flat-plate-like object (1) to be inspected, from positions above or other than below the front surface or the rear surface of an object to be inspected; an imaging means...

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Bibliographische Detailangaben
1. Verfasser:	SAKAGUCHI NAOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	An end section inspecting apparatus is provided with an illuminating means (5) for applying diffused light to an end section of a flat-plate-like object (1) to be inspected, from positions above or other than below the front surface or the rear surface of an object to be inspected; an imaging means (4) for imaging the end section from a position vertical to a surface parallel to the front surface or the rear surface of the object; and an inspecting means (7) for inspecting the status of a portion inclined from the front surface or the rear surface of the end section, by using the image obtained by the imaging means.