APPARATUS FOR PROCESSING SUBSTRATES

APPARATUS FOR PROCESSING SUBSTRATES

A substrate processor is provided to reduce the establishment area of the apparatus by piling up the cassette on the load stock. A substrate processor comprises a load stock(100) loading a cassette(20) accommodating the several boards(10) to the double layer; the first transport unit(200) transferri...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: PARK, SUN YONG, NOH, HWAN IK
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A substrate processor is provided to reduce the establishment area of the apparatus by piling up the cassette on the load stock. A substrate processor comprises a load stock(100) loading a cassette(20) accommodating the several boards(10) to the double layer; the first transport unit(200) transferring the cassette loaded on the load stock; the second transport unit(400) transferring the substrates adopted to the cassette transferred with the first transport unit; a substrate handling part(300) processing the surface of each substrate transferred by the second transport unit.