MODULAR CVD EPI 300MM REACTOR

The present invention provides methods and apparatus for processing semiconductor substrates. Particularly, the present invention provides a modular processing cell to be used in a cluster tool. The modular semiconductor processing cell of the present invention comprises a chamber having an inject c...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	CAMPBELL JEFFREY, MAGILL KEITH M, CHACIN JUAN M, CARLSON DAVID K, METZNER CRAIG R, ISHIKAWA DAVID MASAYUKI, COLLINS RICHARD O, AFZAL IMRAN, BURROWS BRIAN H, DEMARS DENNIS L, ANDERSON ROGER N
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The present invention provides methods and apparatus for processing semiconductor substrates. Particularly, the present invention provides a modular processing cell to be used in a cluster tool. The modular semiconductor processing cell of the present invention comprises a chamber having an inject cap, a gas panel module configured to supply one or more processing gas to the chamber through the inject cap, wherein the gas panel module is position adjacent the inject cap. The processing cell further comprises a lamp module positioned below the chamber. The lamp module comprises a plurality of vertically oriented lamps.