A POLYMER VIBRATION PLATE OF MICRO OR THIN FILM SPEAKER AND ITS MANUFACTURE METHOD BY ION BEAM IRRADIATION

A polymer vibration plate for a micro speaker or a thin film speaker is provided to improve reproduction quality and the reproduction volume in a lower range and a high range. An outer part of a vibration plate is masked locally(S100). An ion beam is injected to the masked vibration plate(S200). The vibration plate for a micro speaker or a thin film speaker is made of the polymer including PI, PEI, PEN, PET, and PPS. In an ion beam irradiation process, the reproduction range or durability of the vibration plate is controlled by the energy of the ion beam or the ion beam irradiation quantity(S300). The ion beam is made of the inert gas ion including boron(B), xenon(Xe) and nitrogen(N) or the metallic ion.