TRANSFER APPARATUS OF PANEL

A substrate transfer apparatus is provided to increase the number of buffers and automatic carrying machines to four, thereby improving reception ability of a cassette. Stockers(150,152) contain a cassette in which a plurality of glass substrates are contained. A plurality of process equipment(140a,...

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Bibliographische Detailangaben
1. Verfasser:	SHIN, JEE HOON
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING HANDLING THIN OR FILAMENTARY MATERIAL NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PACKING PERFORMING OPERATIONS PHYSICS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A substrate transfer apparatus is provided to increase the number of buffers and automatic carrying machines to four, thereby improving reception ability of a cassette. Stockers(150,152) contain a cassette in which a plurality of glass substrates are contained. A plurality of process equipment(140a,140b) performs a predetermined manufacturing process. A plurality of AGVs(Automatic Guided Vehicle)(110a~110d) transfers a glass substrate to the process equipment in which another stocker or a next process is performed. A transfer rail(160) is prepared in a process line floor in order to guide a transfer path of the AGV. A controller(170) controls the plurality of AGVs, the plurality of stokers and the plurality of process equipment.