HORIZONTAL NANOWIRE GROWTH METHOD AT SELECTIVE LOCATION, NANOWIRE PREPARED THEREFROM AND NANO DEVICE COMPRISING THE SAME

A regioselectively lateral nanowire growth process is provided to improve integration degree of device by selecting desired location when nano device is manufactured and growing nanowire. A regioselectively lateral nanowire growth process comprises steps of: forming the first oxide silicon thin film on a silicon substrate; forming two or more long grooves; removing the remaining first oxide silicon thin film; forming a silicon core surrounded by the second oxide silicon thin film(3); etching perpendicularly a predetermined part of both sides of a silicon core surrounded by the second silicon thin film by patterning and removing it; forming a hollow channel of which the both sides are opened; depositing a catalyst metal layer on one end of the hollow channel; forming a protective film on a top surface of the catalyst metal layer; and growing nanowire in the hollow channel from the catalyst metal layer(7) to the silicon substrate in horizontal direction.