ROTATABLE CONTAMINATION BARRIER AND LITHOGRAPHIC APPARATUS COMPRISING SAME

A rotatable contamination barrier (1) for use with an EUV radiation system is disclosed. The contamination barrier (1) has a blade structure (2) configured to trap contaminant material coming from a radiation source (6), a bearing structure, coupled to a static frame, configured to rotatably bear th...

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1. Verfasser:	VAN DEN WILDENBERG LAMBERTUS ADRIANUS
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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