DEVICE FOR FLUID TREATING PLATE-LIKE ARTICLES

Herein disclosed is a device for fluid treatment of a plate-like article comprising a rotary head for holding and rotating a plate-like article around a substantially vertical rotation axis-drive means to suspend and drive the rotary head without contact, the means to suspend and drive the rotary he...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	OBWEGER RAINER
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	Herein disclosed is a device for fluid treatment of a plate-like article comprising a rotary head for holding and rotating a plate-like article around a substantially vertical rotation axis-drive means to suspend and drive the rotary head without contact, the means to suspend and drive the rotary head being arranged radially around the rotary head-a substantially cylindrical sidewall, which is substantially concentric to the rotation axis, wherein the cylindrical sidewall is arranged between the rotary head and the drive means and is introduced in the gap between the rotary head and the drive means-elevating means for lifting and lowering the rotary head and the wall relative to each other. ® KIPO & WIPO 2009