METHOD FOR REMOVING ORGANIC ELECTROLUMINESCENT RESIDUES FROM A SUBSTRATE

A method for removing organic electroluminescent residues from a substrate extends a lifetime of the substrate and increases efficiency of the process by using a dry etching method. The process gas made of gas including fluorine is provided. The reactive species is provided by activating the process...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	PLISHKA MARTIN JAY, MAROULIS PETER JAMES, ROGERS STEVEN ARTHUR, DICKENSON JOHN BARTRAM, SISTERN MARK IAN, JOHNSON ANDREW DAVID
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A method for removing organic electroluminescent residues from a substrate extends a lifetime of the substrate and increases efficiency of the process by using a dry etching method. The process gas made of gas including fluorine is provided. The reactive species is provided by activating the process gas within a remote chamber operating in a plasma etching mode by using the plasma energy supply source. The organic electroluminescent residues is volatilized and removed from the substrate by contacting the reactive species with a surface of the substrate.