METHOD OF PLANARIZATION FOR SETTER

A planarization method of a setter is provided to prevent deformation of a recycled setter because the planarization temperature is higher than use temperature of the setter, and to reduce a planarization time of the setter by putting a pressing object on the setter. A planarization method of a sett...

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Bibliographische Detailangaben
Hauptverfasser:	MURAGUCHI YUKITO, ISHIKAWA TAKAHISA, NAKAJIMA HIROHITO, MORI TOSHINORI, KAWANO TOMOYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY GLASS LIME, MAGNESIA MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES METALLURGY MINERAL OR SLAG WOOL REFRACTORIES SLAG TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	A planarization method of a setter is provided to prevent deformation of a recycled setter because the planarization temperature is higher than use temperature of the setter, and to reduce a planarization time of the setter by putting a pressing object on the setter. A planarization method of a setter solves warpage of a ceramic setter for placing and heat-treating an object, and includes the steps of: putting a curved setter(1) on a flat surface(2); and leveling the setter to conform to the flat surface by heating the setter at a temperature higher than the temperature of the heat treatment of the object. The setter is formed of a sintered material of ceramics, and the heating temperature during the planarization is lower than the firing temperature when the setter is sintered.