MULTI-LAYER TEMPERATURE CONTROL APPARATUS OF SEMICONDUCTOR MANUFACTURING EQUIPMENT AND METHOD OF THE SAME

A method and an apparatus for adjusting a temperature of semiconductor manufacturing equipment are provided to reliably control a temperature on an overall surface of a wafer by adopting a MIMO(Multiple Input Multiple Output) control scheme. An apparatus for adjusting a temperature of semiconductor...

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Bibliographische Detailangaben

1. Verfasser:	LEE, NAE IL
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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