SUBSTRATE SUPPLYING APPARATUS

A substrate supplying apparatus is provided to support a substrate by a roller of a sub roller unit during substrate transfer by fixing the sub roller unit to an upper inner side of a roller unit, thereby preventing breakdown or damage caused by droop of the substrate. First and second cassette supp...

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Bibliographische Detailangaben
1. Verfasser: LEE, CHOON DAE
Format: Patent
Sprache:eng
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