SUBSTRATE SUPPLYING APPARATUS

A substrate supplying apparatus is provided to support a substrate by a roller of a sub roller unit during substrate transfer by fixing the sub roller unit to an upper inner side of a roller unit, thereby preventing breakdown or damage caused by droop of the substrate. First and second cassette supp...

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Bibliographische Detailangaben
1. Verfasser:	LEE, CHOON DAE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING HANDLING THIN OR FILAMENTARY MATERIAL NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PACKING PERFORMING OPERATIONS PHYSICS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A substrate supplying apparatus is provided to support a substrate by a roller of a sub roller unit during substrate transfer by fixing the sub roller unit to an upper inner side of a roller unit, thereby preventing breakdown or damage caused by droop of the substrate. First and second cassette supporting bars(14,15) are installed in both sides of a body unit(12). First and second cassette mounting units(16,17) are respectively installed in inner sides of the first and second cassette supporting bars, and reciprocate in upper and lower directions. A substrate transfer unit(20) is installed on the body unit between the first and second cassette supporting bars, and has plural roller units(18). A sub roller unit is installed in the substrate transfer unit, and supplementally supports the substrate when transferring the substrate.