ANISOTROPIC CONDUCTIVE FILM BONDING APPARATUS
An anisotropic conductive film bonding apparatus is provided to prevent a panel entering the apparatus from being damaged by broken glass or particles in a previous process. An anisotropic conductive film bonding apparatus includes a substrate stage(210) on which a substrate is mounted, a supply uni...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | An anisotropic conductive film bonding apparatus is provided to prevent a panel entering the apparatus from being damaged by broken glass or particles in a previous process. An anisotropic conductive film bonding apparatus includes a substrate stage(210) on which a substrate is mounted, a supply unit(100), a carrier(500), and a cleaning member(400). The supply unit supplies an anisotropic conductive film(130) to the substrate stage. The carrier transfers the anisotropic conductive film from the supply unit to the substrate stage. The cleaning member cleans the substrate stage. The cleaning member is a brush. |
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