CLEANING DEVICE AND CLEANING METHOD USING THE SAME

A cleaning device and a cleaning method using the same are provided to reduce amount of washing liquid consumed by installing two washing liquid tanks for circulating the washing liquid. A cleaning device comprises a conveyor(100) transferring a substrate, a brush washing chamber(30), a cavitation w...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LEE, SOO CHAN, KIM, YUN HWAN, KIM, YOUNG IL, JEON, JAE CHEOL, MOON, YUN SEOK
Format:	Patent
Sprache:	eng
Schlagworte:	CLEANING CLEANING IN GENERAL DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PERFORMING OPERATIONS PHYSICS PREVENTION OF FOULING IN GENERAL TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORTING
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