CLEANING DEVICE AND CLEANING METHOD USING THE SAME

A cleaning device and a cleaning method using the same are provided to reduce amount of washing liquid consumed by installing two washing liquid tanks for circulating the washing liquid. A cleaning device comprises a conveyor(100) transferring a substrate, a brush washing chamber(30), a cavitation washing chamber(40), a wet type washing chamber(50), an ultrasonic washing chamber(60), washing liquid tanks(710,720,730,740), an inlet and outlet pipes, filters(700), and a discharging pipe. The brush washing chamber washes contaminants on the substrate by injecting washing liquid via the friction of the brush and a first fluid nozzle(200). The cavitation washing chamber washes the contaminants on the substrate by injecting the washing liquid supplied by a high pressure pump of 0.9 to 1.3 MPa and by the first fluid nozzle and a second fluid nozzle(400). The wet washing chamber washes the contaminants by injecting the washing liquid via the first fluid nozzle. The ultrasonic washing chamber provides a megasonic cleaning for generating bubbles by applying ultrasonic waves to the washing liquid, and for injecting the washing liquid having bubbles. The inlet and outlet pipes are connected between the washing liquid tanks or to at least one of the brush, cavitation, wet, or ultrasonic washing chambers. The filters placed at the outlet pipe filter the contaminants. The discharging pipe discharges the washing liquid used for washing and the contaminants removed from washing. The inlet pipe flows in the washing liquid used for washing and the contaminants removed from washing to the washing liquid tanks. The outlet pipe flows out the washing liquid of the washing liquid tanks to the washing chamber.