APPARATUS FOR TRANSFERRING SUBSTRATE AND APPARATUS FOR MANUFACTURING THIN FILM HAVING THE SAME

A substrate transfer apparatus and a thin film forming apparatus having the same are provided to transfer a substrate with the tray member which is in magnetic levitation, thereby avoiding generation of particles while minimizing deformation of a substrate. A substrate transfer apparatus comprises a tray member and a guide rail. The tray member comprises a tray part(110) for mounting a substrate(130), and a floating part(120) having first and second floating faces formed by extending one end of the tray part and that are symmetrically inclined to each other around a central shaft of the one end of the tray part. The guide rail is disposed on a moving passage of the tray member, comprising first and second guide rails(210,220) having first and second inclined faces that face the first and second floating faces in parallel to make the tray member float.