VACUUM VALVE

A vacuum valve is provided to extend lifespan of a bellows by reducing impact acceleration of a piston or a valve body, thereby enhancing durability thereof. A vacuum valve(1) includes a valve unit(2) and a bellows(31). The valve unit has first and second ports(7,8), a valve sheet(9) arranged betwee...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MAKOTO IWATA, MASAHIRO NAITOH, SHIN ITO, MICHINORI IKUJI
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A vacuum valve is provided to extend lifespan of a bellows by reducing impact acceleration of a piston or a valve body, thereby enhancing durability thereof. A vacuum valve(1) includes a valve unit(2) and a bellows(31). The valve unit has first and second ports(7,8), a valve sheet(9) arranged between the first and second ports, and a valve body(10) contacted on or spaced apart from the valve sheet. The bellows has an orifice(24) to supply working fluid and a piston(22) connected to the valve body. The piston is operated by a pressure change of the working fluid. The bellows is expanded and contracted according to rectilinear reciprocating motion of an actuator unit(3) and the valve body. The orifice has an effective section to make operation speed of the valve body and the piston to be a predetermined speed for preventing damage to the bellows.