METHOD FOR CLEANING A SUBSTRATE

A substrate cleaning method is provided to compose an azeotropic mixture having surface tension smaller than surface tension of deionized water and water by using an in-line static mixer installed at a dispenser. A substrate(102) is rotated. A cleaning solution is dispensed onto a surface of the rot...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	GIMM, DAE HEE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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