LOW TEMPERATURE AEROSOL DEPOSITION OF A PLASMA RESISTIVE LAYER

A method of low temperature aerosol deposition of a plasma resistive layer is provided to protect chamber components from corrosive plasma environment and increase lifespan of the chamber components by depositing a plasma resistive layer on the chamber components at a stable low temperature. A metho...

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Bibliographische Detailangaben

Hauptverfasser:	KATS SEMYON L, RYABOVA ELMIRA, THACH SENH, ZHU XI, SUN JENNIFER Y
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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