TRACK APPARATUS FOR PLATE DISPLAY

A track apparatus for a flat panel display device is provided to correct CD(Critical Dimension) non-uniformity caused by developer connection time difference by controlling temperature of heat transmitted from a heating plate to a substrate, thereby improving uniformity of the CD. A heating plate(25...

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Bibliographische Detailangaben
1. Verfasser:	SON, JONG HOON
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	A track apparatus for a flat panel display device is provided to correct CD(Critical Dimension) non-uniformity caused by developer connection time difference by controlling temperature of heat transmitted from a heating plate to a substrate, thereby improving uniformity of the CD. A heating plate(25) is disposed within a process chamber. A heat emitting body(26) is disposed within the heating plate. Plural substrate support pins(24a,24b) are disposed in an upper surface of the heating plate, and have different heights according to a scan direction of a slit nozzle. In the substrate support pin, a pre-operation area by the scan direction of the slit nozzle has a height lower than a post-operation area.