METHOD OF MANUFACTURING ELECTRON EMISSION DEVICE AND ELECTRON EMISSION DEVICE MANUFACTURED BY THE SAME

A method for manufacturing an electron emission device and an electron emission device manufactured thereby are provided to lengthen a lifetime of the electron emission device by improving uniformity between pixels and reducing emission of a diode. A method for manufacturing an electron emission dev...

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Hauptverfasser: JEON, JI HYUN, CHOE, DEOK HYEON, HWANG, MYUNG ICK, CHO, SUNG HEE, HA, JAE SANG, PARK, JONG HWAN, LEE, NAE SUNG, KIM, JUN SEOP
Format: Patent
Sprache:eng
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Zusammenfassung:A method for manufacturing an electron emission device and an electron emission device manufactured thereby are provided to lengthen a lifetime of the electron emission device by improving uniformity between pixels and reducing emission of a diode. A method for manufacturing an electron emission device includes a process for forming an electron emission source(150) including a carbon-based material and a process for emitting the electron emission source in an inside of a chamber including gas. The gas includes oxygen. A vacuum degree in the chamber including the gas is 8x10^-6 Torr to 8x10^-3 Torr. The emission process is performed for 10 minutes to 5 hours. In the emission process, the density of current applied to the electron emission source is 10 micro-Ampere/cm^2 to 100 micro-Ampere/cm^2.