THE SUBSTRATE TRANSFER

A substrate transferring apparatus is provided to improve transfer efficiency by transferring a substrate using transfer rollers arranged in upper and lower portions of an edge of the substrate. A substrate transferring apparatus(10) comprises: a transfer table(11) provided with a support pad(13) su...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ROH, SEUNG KEE, KIM, CHOO HO, LEE, BYUNG JOON, KIM, CHANG SEON, CHOI, IL SUP, SHIN, JAE BONG
Format:	Patent
Sprache:	eng
Schlagworte:	CONVEYING DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING HANDLING THIN OR FILAMENTARY MATERIAL NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PACKING PERFORMING OPERATIONS PHYSICS PNEUMATIC TUBE CONVEYORS SHOP CONVEYOR SYSTEMS STORING TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A substrate transferring apparatus is provided to improve transfer efficiency by transferring a substrate using transfer rollers arranged in upper and lower portions of an edge of the substrate. A substrate transferring apparatus(10) comprises: a transfer table(11) provided with a support pad(13) supporting a substrate(S), a transfer roller(20) assembled with a lower transfer roller(21) arranged in a lower side of the substrate and an upper transfer roller(26) arranged in an upper side of the substrate and a driving source(30) connected to the lower transfer roller, which transmits rotation force to the lower transfer roller. The lower transfer roller is provided with a lower gear connected to the driving source and a lower roller member contacted to the substrate. Additionally, the upper transfer roller is provided with an upper gear engaged with a lower gear and rotated by rotation of the lower gear and an upper roller member contacted to the substrate.