PATTERN MANUFACTURING EQUIPMENTS, ORGANIC THIN-FILM TRANSISTORS AND MANUFACTURING METHODS FOR ORGANIC THIN-FILM TRANSISTORS

A pattern manufacturing equipment, an organic thin film transistor, and a method for manufacturing the same are provided to form a stable wet pattern on a substrate and improve a reliability of the organic thin film transistor. A pattern manufacturing equipment(80) includes a coating device, an expo...

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Bibliographische Detailangaben
Hauptverfasser:	ANDOU MASAHIKO, IMAZEKI SYUJI, INOUE TOMOHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	A pattern manufacturing equipment, an organic thin film transistor, and a method for manufacturing the same are provided to form a stable wet pattern on a substrate and improve a reliability of the organic thin film transistor. A pattern manufacturing equipment(80) includes a coating device, an exposure device, a droplet dropping device(55), a measuring device(58), and a determining device. The coating device coats a liquid film on a substrate(190). The exposure device is placed on a rear side of the substrate and forms the liquid film coated on the substrate into a pattern according to gate electrodes(13). The droplet dropping device drops a test liquid to a surface of the substrate having the pattern of the liquid film formed by the exposure device. The measuring device detects the droplet dropped by the droplet dropping device. The determining device determines whether the pattern of the liquid film formed by the exposure device is proper or not based on the droplet detected by the detecting device.