BONDING DEVICE AND FA BRICATION METHOD OF LIGHT EMITTING DEVICE USING THEREOF

A bonding device and a method for manufacturing an OLED(Organic Light Emitting Device) are provided to extend a lifetime of the OLED by preventing a pressure from being focused on a portion of a substrate during a bonding process. A bonding device includes a process chamber(100), first and second su...

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Bibliographische Detailangaben
Hauptverfasser:	JEON, AE KYUNG, YOO, CHOONG KEUN
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY
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Beschreibung
Zusammenfassung:	A bonding device and a method for manufacturing an OLED(Organic Light Emitting Device) are provided to extend a lifetime of the OLED by preventing a pressure from being focused on a portion of a substrate during a bonding process. A bonding device includes a process chamber(100), first and second substrate support members(110,120), and an open/close valve(140). The first and second substrate support members are arranged in the process chamber. The substrate support members are arranged to fix the substrates. The open/close valve is arranged on a predetermined region of the process chamber and adjusts a pressure in the process chamber by opening/closing the process chamber. At least one of the first and second substrates includes an electrostatic chuck and a polarity inverting unit. The electrostatic chuck includes at least two electrodes with different polarities. The polarity inverting unit inverts the polarity of the electrodes.