UNIT FOR LEVITATING OBJECT TO BE CONVEYED, DEVICE FOR LEVITATING OBJECT TO BE CONVEYED, AND STAGE DEVICE

A unit (50) for levitating an object to be conveyed, having a blow flow path (66) for blowing air from a blow hole (54), and a suction flow path (64) for sucking air from a suction opening (56) provided on the upper surface (52) side. The blow flow path (66) has large flow paths (70) and small flow...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KAWACHI SHUNICHI, FUJIKAWA MASAYUKI
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A unit (50) for levitating an object to be conveyed, having a blow flow path (66) for blowing air from a blow hole (54), and a suction flow path (64) for sucking air from a suction opening (56) provided on the upper surface (52) side. The blow flow path (66) has large flow paths (70) and small flow paths (68), having different flow path cross-sections, and as a result, the blow flow path (66) has portions where a flow path cross-section discontinuously varies. Rigidity of a glass substrate when held as the object to be conveyed can be enhanced by causing pressure loss to occur at the portions where the flow path cross-section varies.