PROBE UNIT AND INSPECTING APPARATUS

A probe unit and an inspecting apparatus are provided to facilitate maintenance of the probe unit by detachably attaching components on an inner side of the probe unit from outside. A probe unit includes a fixing block(40), an installation block(41), a support block(42), a probe assembly(34) and a c...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SAITOH TOYOKAZU, AKAHIRA MEGUMI, MIURA KAZUYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING
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Beschreibung
Zusammenfassung:	A probe unit and an inspecting apparatus are provided to facilitate maintenance of the probe unit by detachably attaching components on an inner side of the probe unit from outside. A probe unit includes a fixing block(40), an installation block(41), a support block(42), a probe assembly(34) and a connection cable(35). The fixing block supports the probe unit. The installation block is supported by the fixing block. The support block is integrated wit the installation block. The probe assembly is inserted into and supported by the support block. The connection cable is supported on one surface of the support block and electrically connected to the probe assembly. An expanding portion, which is wider than the installation block, is formed on the support block. A nut hole is formed on the support block. A nut for fixing the connection cable on the support block is detachably attached into the nut hole from outside, such that the nut is fixed on the expanding portion.