VERTICAL DIFFUSED FURNACE DEVICE

A vertical diffusion furnace is provided to spray a process gas uniformly onto an upper portion of a boat, thereby depositing a layer on wafers loaded in the boat to have uniform thickness, and to prevent a uniformity badness of material coated on the wafers. A boat(1) receiving plural wafers is mov...

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Bibliographische Detailangaben
1. Verfasser:	YI, SEONG HYEON
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A vertical diffusion furnace is provided to spray a process gas uniformly onto an upper portion of a boat, thereby depositing a layer on wafers loaded in the boat to have uniform thickness, and to prevent a uniformity badness of material coated on the wafers. A boat(1) receiving plural wafers is moved up and down in a chamber. A gas supply tube supplies a process gas onto an upper portion of the boat. A nozzle(5) is integrally formed with the gas supply pipe to spray the process gas. A gas discharge pipe(2b) discharges the used process gas, and the process is carried out in an inner tube(2). An outer tube(3) encloses the inner tube to isolate the inner space of the inner tube from an exterior. The inner tube has a semi-spherical upper portion.