APPARATUS FOR POLARIZATION MEASUREMENT, ELLIPSOMETER AND METHOD FOR MEASURING POLARIZATION

A polarized light measuring device, an oval spectrometer, and a method for measuring a condition of polarization are provided to detect the polarization effectively and rapidly and to cut down expenses. A polarized light measuring device comprises a diffraction lattice(140) and a detector(150). The diffraction lattice is used to diffract incident light to show polarization of light. The detector is used to collect the diffracted light from the diffraction lattice and to detect the polarization of the light. The diffraction lattice includes a lattice formed by digging a regular groove. A penetration rate according to a polarization direction of the light is controlled by adjusting depth of a gap and a groove of the lattice. An oval spectrometer(105) includes an optical source(110) and a polarization unit(120). The optical source is used to generate the light, and the polarization unit is installed to polarize and provide the light generated from the optical source, to a sample(130). A method for measuring a condition of the polarization includes a step of passing the light through the diffraction lattice and diffracting the light to show the polarization condition of the light.