SYSTEM AND METHOD FOR MOVING A COMPONENT THROUGH A SETPOINT PROFILE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

SYSTEM AND METHOD FOR MOVING A COMPONENT THROUGH A SETPOINT PROFILE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

A system and a method for moving a component through a set-point profile, a lithographic apparatus, and a device manufacturing method are provided to enhance accuracy of a feedforward control by using a repetitive learning control method. A displacement device(10a,10b) moves a component according to...

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Bibliographische Detailangaben
Hauptverfasser: VAN DONKELAAR EDWIN TEUNIS, TSO YIN TIM, HEERTJES MARCEL FRANCOIS
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A system and a method for moving a component through a set-point profile, a lithographic apparatus, and a device manufacturing method are provided to enhance accuracy of a feedforward control by using a repetitive learning control method. A displacement device(10a,10b) moves a component according to a set-point profile. A data storage device(16) includes a library of feedforward data. A signal generation unit identifies a plurality of time segments of the set-point profile corresponding to entries in the library of the feedforward data, and accesses the entries in order to compose a feedforward signal. A feedforward control system(12) controls the displacement device on the basis of the feedforward signal of the signal generator.