LENS MODULE COMPRISING AT LEAST ONE REPLACEABLE OPTICAL ELEMENT

Disclosed is a lens module (7), especially a projection lens for semiconductor lithography, comprising at least one replaceable optical element (9) that is disposed in a lens housing (12). At least one gas exchange device (15) is positioned in an area of the replaceable optical element (9) in such a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	BUECHELE JOACHIM, BACK STEPHAN, SOYEZ GUIDO, KALLER JULIAN, LIMBACH GUIDO, WOELFLE HARALD
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	Disclosed is a lens module (7), especially a projection lens for semiconductor lithography, comprising at least one replaceable optical element (9) that is disposed in a lens housing (12). At least one gas exchange device (15) is positioned in an area of the replaceable optical element (9) in such a way that a receiving zone (10') for the replaceable optical element (9) can be flushed when the optical element (9) is replaced.