ROLLER SYSTEM FOR SUBSTRATE MOVING IN OLED MANUFACTURING
A roller apparatus for transferring a deposition substrate to manufacture an organic light emitted diode is provided to improve the yield of an organic element by preventing a time delay when the substrate is transferred between chambers. A roller apparatus for transferring a deposition substrate to...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A roller apparatus for transferring a deposition substrate to manufacture an organic light emitted diode is provided to improve the yield of an organic element by preventing a time delay when the substrate is transferred between chambers. A roller apparatus for transferring a deposition substrate to manufacture an organic light emitted diode includes a roller rod(12), a first circular magnet(14), a belt(15), a motor(16), a plurality of rotation wheels(17), and a second circular magnet. A substrate is transferred in a vessel of a high vacuum by a rotation roller apparatus having the plurality of rotation wheels(17) and the circular magnets(14). The plurality of rotation wheels(17) are attached to the roller rod(12) at predetermined intervals. The second circular magnet is attached to an end of the roller rod(12). An end of the rotation rod(12) is connected to the motor(16) through the belt(15). If the motor(15) rotates and drives the belt(15), the rotation rod(12) is rotated. A magnetic force caused by the rotation of the magnet attached to the rotation rod(12) is transferred to the first circular magnet(14) attached to the roller rod(12). The substrate is transferred by the rotation movement of the rotation wheels(17) and the abrasion between the rotation wheels(17) and the substrate. |
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