METHOD FOR FABRICATING IMAGE SENSOR AND IMAGE SENSOR FABRICATED THEREBY

A method for fabricating an image sensor is provided to reduce a potential barrier generated by an impurity density difference between regions in a transfer gate pattern by forming an image sensor after impurities of a first conductivity type are implanted into a transfer gate pattern. A gate insula...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: PARK, YOUNG HOON, SEONG, DAE CHEOL, JUNG, SANG IL, LEE, WON JEONG, KIM, EUN SOO, HONG, JONG WOOK, PARK, JIN HYEONG, SONG, JAE HO, PARK, KEO SUNG, PARK, CHAN, PARK, WON JE, KIM, PU RA
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A method for fabricating an image sensor is provided to reduce a potential barrier generated by an impurity density difference between regions in a transfer gate pattern by forming an image sensor after impurities of a first conductivity type are implanted into a transfer gate pattern. A gate insulation layer and a gate conductive layer doped with impurities of a first conductivity type are formed on a semiconductor substrate(102). The gate insulation layer and the gate conductive layer are patterned to form a transfer gate pattern. A photodiode of the first conductivity type is formed at one side of the transfer gate pattern and a photodiode of a second conductivity type is formed on the photodiode of the first conductivity type. A floating diffusion region of the first conductivity type is formed in the substrate at the other side of the transfer gate pattern to complete a transfer gate electrode. In forming a gate conductive layer, the impurities of the first conductivity type can be doped at a dosage that can invert the impurities in the photodiode of the second conductivity type.