CLEANING CHAMBER AND DOOR SEALING METHOD OF THE SAME

CLEANING CHAMBER AND DOOR SEALING METHOD OF THE SAME

A cleaning chamber is provided to reduce the possibility of generation of a leak in a sealing tube by removing a sealing part. An inlet is formed in one lateral surface of a cleaning chamber(100). A door opens/shuts the inlet by a sliding method. When the door is shut, the edge of the inlet is surro...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: CHAE, KWANG SU
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A cleaning chamber is provided to reduce the possibility of generation of a leak in a sealing tube by removing a sealing part. An inlet is formed in one lateral surface of a cleaning chamber(100). A door opens/shuts the inlet by a sliding method. When the door is shut, the edge of the inlet is surrounded by a sealing tube(120) to adjoin the edge of the door wherein one end of the sealing tube is sealed. A nozzle(130) is jointed to the other end of the sealing tube. A pump injects gas to the inside of the sealing tube through the nozzle or absorbs the gas in the sealing tube. The gas can be CDA(clean dry air). The one end of the sealing tube can be sealed by a bracket(122).