BARIUM TITANATE THIN FILMS WITH TITANIUM PARTIALLY SUBSTITUTED BY ZIRCONIUM, TIN OR HAFNIUM
Disclosed are high permittivity (dielectric constant), thin film CSD barium titanate based dielectric precursor solution comprising barium acetate, a titanium source and a B site cation source. The dielectrics show capacitance as a function of temperature that better satisfies the X7R requirements....
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | Disclosed are high permittivity (dielectric constant), thin film CSD barium titanate based dielectric precursor solution comprising barium acetate, a titanium source and a B site cation source. The dielectrics show capacitance as a function of temperature that better satisfies the X7R requirements. A method of making a capacitor with this barium titanate based dielectric precursor solution is disclosed. |
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