TRANSFER CHAMBER, SUBSTRATE PROCESSING APPARATUS AND METHOD FOR SENSING TROUBLE OF A SUBSTRATE

A transfer chamber, a substrate processing apparatus, and a method of detecting a defect of a substrate are provided to optically detect a defect on a substrate by placing optical sensors near an opening through which the substrate is loaded and unloaded. A transfer chamber(20) is located in proximi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUEKI HIDEHITO, OKABE SEIJI
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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