LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD UTILIZING A MULTIPLE DICTIONARY COMPRESSION METHOD FOR FPD

A lithographic apparatus and a device manufacturing method are provided to enhance data compression/decompression processes by using a multiple dictionary compression manner for an FPD(Flat Panel Display). A lithographic apparatus(1) includes a predetermined array, a compressed pattern memory, and a...

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Hauptverfasser:	KESSELS LAMBERTUS GERARDUS MARIA, VAN ENGELEN REMCO JOHANNES, TINNEMANS PATRICIUS ALOYSIUS JACOBUS
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A lithographic apparatus and a device manufacturing method are provided to enhance data compression/decompression processes by using a multiple dictionary compression manner for an FPD(Flat Panel Display). A lithographic apparatus(1) includes a predetermined array, a compressed pattern memory, and a dictionary decompressor. The predetermined array includes a plurality of discretely controllable elements capable of modifying a radiation beam. The compressed pattern memory is used for storing a compressed representation of a requested dose pattern. The dictionary decompressor is used for decompressing partially or entirely the compressed representation. The dictionary decompressor is composed of a first dictionary memory and a first dictionary decoder.