ANALYZING CHAMBER INCLUDING A LEAKAGE ION BEAM DETECTOR AND MASS ANALYZER INCLUDING THE SAME

ANALYZING CHAMBER INCLUDING A LEAKAGE ION BEAM DETECTOR AND MASS ANALYZER INCLUDING THE SAME

An analyzing chamber including a leakage ion beam detector is provided to effectively extract ions required for an ion injection process by preventing an inferiority of an analyzing chamber. A chamber for a mass analyzer includes a body(100), a shielding section(200), and a detector(300). The body h...

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Bibliographische Detailangaben
Hauptverfasser: EARM, HYUN SUB, KANG, GON SU, KIM, YOUNG DAE, AN, SUNG YEUL, LEE, SEUNG SAE
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:An analyzing chamber including a leakage ion beam detector is provided to effectively extract ions required for an ion injection process by preventing an inferiority of an analyzing chamber. A chamber for a mass analyzer includes a body(100), a shielding section(200), and a detector(300). The body has an introduction section(110), a discharge section(120), and an interior passage. The shielding section is arranged along the inner side wall defining the interior passage to prevent the inner side wall from being damaged by ion beams passing through the body. The detector is located between the shielding section and the inner side wall of the body to detect the ion beams reaching the inner side wall.