APPARATUS AND METHOD FOR GAINING A PATTERNED IMAGE

An apparatus and a method are provided to obtain a clear pattern image regardless of the kinds of layers and the shapes of patterns of the layers by using visible rays and infrared rays. An apparatus includes a stage(110) for supporting a wafer with a predetermined pattern, a light source unit for i...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LEE, SANG KIL, LIM, KYU HONG, CHO, HYUNG SUK, KIM, SUNG KWEON
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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